Precision Sapphire Lift Pins Single Crystal Al₂O₃ Wear Resistant
for High-Accuracy Wafer Positioning
Sapphire lift pins are precision mechanical components
manufactured from high-purity single-crystal sapphire, engineered
for high-precision positioning, high-temperature resistance, and
wear-intensive applications. ZMSH provides full-parameter
customization services (including diameter, length, surface
roughness, and crystallographic orientation optimization),
supporting rapid small-batch delivery to meet the extreme
performance demands of semiconductor, medical, aerospace, and
industrial sectors.
Key Characteristics
1. Ultra-high Mechanical Strength: With a compressive strength
exceeding 300,000 psi, these pins withstand high-frequency lifting
loads (e.g., 12-inch wafer handling systems in semiconductor
fabrication).
2. High-Temperature Stability: Operate continuously at 1,500°C
and tolerate short-term exposure up to 2,050°C (ideal for laser
welding or combustion chamber positioning).
3. Low Friction Coefficient: Post-polishing friction
coefficients <0.15 minimize energy loss during precision motion
(e.g., lithography stage adjustments).
4. Chemical Inertness: Resistant to strong acids, alkalis, and
organic solvents, suitable for cleanrooms and semiconductor etching
environments.
Technical Parameters
| Chemical composition | Monocrystalline Al2O3 |
| Hardness | 9Mohs |
| Optic nature | Uniaxial |
| Refractive index | 1.762-1.770 |
| Birefringence | 0.008-0.010 |
| Dispersion | Low, 0.018 |
| Lustre | Vitreous |
| Pleochroism | Moderate to Strong |
| Diameter | 0.4mm-30mm |
| Diameter tolerance | 0.004mm-0.05mm |
| length | 2mm-150mm |
| length tolerance | 0.03mm-0.25mm |
| Surface quality | 40/20 |
| Surface roundness | RZ0.05 |
| Custom shape | both ends flat, one end redius, both end redius,
saddle pins and special shapes |
Primary Applications
(1)Semiconductor Manufacturing
· Wafer Handling Systems: Achieve ±1μm positioning accuracy in 12-inch wafer fabs,
enduring 200 cycles/hour.
· Photolithography Stage Calibration: Compensate for silicon wafer thermal expansion (thermal
expansion coefficient: 5.3×10⁻⁷/°C) via nanometer-scale
adjustments.
(2)Medical Devices
· Surgical Robot Catheters: Ultra-thin-walled tubes (<50μm) enable minimally invasive
vascular interventions without tissue damage.
· Radiotherapy Equipment Calibration: Adjust radiation focal points with ±0.01mm precision in proton
therapy systems.
(3)Aerospace and Defense
· Rocket Vector Control: Deployed in attitude adjustment mechanisms, enduring -196°C to
1,200°C thermal cycling.
· Satellite Optical Systems: Protect exterior payloads during deep-space missions,
maintaining functionality under vacuum and radiation.
(4)Industrial and Research
· Electron Microscopy Stages: Enable ±5nm positioning in 10⁻¹⁰ mbar vacuum environments.
· Nuclear Fusion Reactors: Withstand neutron irradiation (>10¹⁵ n/cm²) and plasma
erosion for >100,000 cycles.
