Sapphire Lift Pins Sapphire Rods Precision Manufacturing Industrial Applications Wafer Handling

ZMSH specializes in the production of sapphire lift pins, with a focus on the R&D, manufacturing, and sales of sapphire crystal materials. Sapphire lift pins are renowned for their exceptional strength, high hardness, corrosion resistance, and superior optical properties, making them ideal for high-end equipment manufacturing and precision machining applications. Additionally, ZMSH offers customized processing services, capable of designing and producing sapphire lift pins in various specifications to meet diverse industrial requirements.

Technical specification

Core Functions of Sapphire Lift Pins

Sapphire lift pins are critical components in semiconductor and LED manufacturing equipment, primarily used for wafer transfer and positioning.

1. Wafer Support & Vertical Movement

In thin-film deposition (e.g., MOCVD), etching, or lithography processes, robotic arms actuate sapphire lift pins to elevate from the chamber floor, precisely supporting wafers (e.g., 2/4/6-inch substrates) while maintaining level positioning to facilitate loading and unloading operations.

2. Stable Performance in High-Temperature Environments

Sapphire (single-crystal Al₂O₃) boasts an ultra-high melting point of 2050°C, enabling prolonged operation above 1000°C (e.g., GaN epitaxial growth) without the risk of thermal deformation or wafer contamination typical of metal pins.

3. Chemical Inertness for Process Integrity

With exceptional resistance to acids, alkalis, and plasma environments, sapphire prevents impurity release during etching or CVD processes, ensuring manufacturing purity (particularly critical for wide-bandgap semiconductors like SiC/GaN).

Key Advantages

1. Ultra-Low Contamination: Compared to metal (e.g., molybdenum) or ceramic (e.g., AlN) alternatives, sapphire generates minimal particulate shedding, meeting Class 10 cleanroom standards.

2. Exceptional Hardness (Mohs 9): Surface scratch resistance extends service life beyond 100,000 cycles—5-8 times longer than quartz pins.

3. Matched Thermal Expansion Coefficient: Close alignment with SiC/GaN wafers (~7.5×10⁻⁶/°C) minimizes thermal stress-induced warping or cracking.

Typical Applications of Sapphire Lift Pins

1. LED Epitaxial Wafer Production: Supports sapphire substrates during GaN epitaxial growth in MOCVD reactors.

2. Power Semiconductor Fabrication: Enables high-temperature ion implantation or annealing processes for SiC wafers.

3. Advanced Packaging: Ensures micron-level precision positioning for ultra-thin wafers (thickness <100μm) in wafer-level packaging (WLP).

Related products

ZMSH specializes in high-quality sapphire rods, engineered for superior strength, thermal stability, and corrosion resistance. Whether you need standard dimensions or custom-designed solutions, we offer precision machining to meet exact specifications.