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4inch 6Inch 4H-N 500mm 350um SIC wafer Silicon Carbide sic Substrate Prime Dummy Grade

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4inch 6Inch 4H-N 500mm 350um SIC wafer Silicon Carbide sic Substrate Prime Dummy Grade

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Brand Name :	zmsh
Model Number :	6inch-001
Price :	by case by FOB
Supply Ability :	50pcs/months
Delivery Time :	within 40days

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4inch 6Inch 4H-N 500mm 350um SIC wafer Silicon Carbide sic Substrate Prime Dummy Grade

6inch 4H-N 500mm 350um sic substrate wafer for powder device

6 inch diameter, Silicon Carbide (SiC) Substrate Specification
Grade		Zero MPD Grade	Production Grade	Research Grade	Dummy Grade

Diameter		150.0 mm±0.2mm

ThicknessΔ		350 μm±25μm or 500±25un

Wafer Orientation		Off axis : 4.0° toward< 1120> ±0.5° for 4H-N On axis : <0001>±0.5° for 6H-SI/4H-SI

Primary Flat		{10-10}±5.0°

Primary Flat Length		47.5 mm±2.5 mm

Edge exclusion		3 mm

TTV/Bow /Warp		≤15μm /≤40μm /≤60μm

Micropipe Density		≤1 cm-2	≤5 cm-2	≤15 cm-2	≤100 cm-2

Resistivity	4H-N	0.015~0.028 Ω·cm

	4/6H-SI	≥1E5 Ω·cm

Roughness		Polish Ra≤1 nm

		CMP Ra≤0.5 nm

Cracks by high intensity light		None		1 allowed, ≤2 mm	Cumulative length ≤ 10mm, single length≤2mm

Hex Plates by high intensity light		Cumulative area ≤1%		Cumulative area ≤2%	Cumulative area ≤5%

Polytype Areas by high intensity light		None		Cumulative area≤2%	Cumulative area≤5%

Scratches by high intensity light		3 scratches to 1×wafer diameter cumulative length		5 scratches to 1×wafer diameter cumulative length	5 scratches to 1×wafer diameter cumulative length


Edge chip		None		3 allowed, ≤0.5 mm each	5 allowed, ≤1 mm each

Contamination by high intensity light		None

About our company

SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014.

We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widely used in electronics, optics, optoelectronics and many other fields. We also have been working closely with many domestic and oversea universities, research institutions and companies, provide customized products and services for their R&D projects.

It's our vision to maintaining a good relationship of cooperation with our all customers by our good reputatiaons.

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